Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement

Bofan Wang; Zhongliang Li; Xiangzhao Wang

doi:10.3788/col201210.071202

Journals >Chinese Optics Letters >Volume 10 >Issue 7 >Page 071202 > Article

Chinese Optics Letters
Vol. 10, Issue 7, 071202 (2012)

Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement

Bofan Wang, Zhongliang Li, and Xiangzhao Wang

DOI: 10.3788/col201210.071202 Cite this Article Set citation alerts

Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202 Copy Citation Text

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Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202

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