Infrared optical properties of hydrogenated amorphous carbon films (a-C:H)

[in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 35 >Issue 6 >Page 777 > Article

Infrared and Laser Engineering
Vol. 35, Issue 6, 777 (2006)

Infrared optical properties of hydrogenated amorphous carbon films (a-C:H)

[in Chinese]^1、2、* and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese]. Infrared optical properties of hydrogenated amorphous carbon films (a-C:H)[J]. Infrared and Laser Engineering, 2006, 35(6): 777 Copy Citation Text

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References

[1] ANGUS J C,BUCK F A,SUNKARA M,et al,Diamond growth at low pressures[J].Materials Research,Bulletin,1989,14 (10):38-47.

[2] ROBERTSON J.Properties of diamond-like carbon[J].Surf Cost Technol,1992,50:185-203.

[3] FOROUHI A R,BLOOMER I.Optical dispersion relations for amorphous semiconductors and amorphous dielectrics[J].Phys Rev B,1986,34:7018-7026.

[4] KIM S Y.Simutaneous determination of refractive index,extinction coefficient and void distribution of titanium dioxide thin film by optical methods[J].Appl Opt,1996,34:6703-6707.

[6] HONG J,GOULLET A,TURBAN G.Optical characterization of hydrogenated amorphous carbon thin films deposited from methane plasma[J].Thin Solid Films,2000,364(1):144-149.

[7] HATADA R,BABA K.Prepamtion of hydrophobic diamond like carbon films by plasma source ion implantation[J].Nuclear

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[in Chinese], [in Chinese]. Infrared optical properties of hydrogenated amorphous carbon films (a-C:H)[J]. Infrared and Laser Engineering, 2006, 35(6): 777

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