• Laser & Optoelectronics Progress
  • Vol. 47, Issue 3, 32401 (2010)
Hu Jiangchuan*, Liu Xialai, Qiu Fuming, Guo Bo, Yan Dingyao, and Yang Liming
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop47.032401 Cite this Article Set citation alerts
    Hu Jiangchuan, Liu Xialai, Qiu Fuming, Guo Bo, Yan Dingyao, Yang Liming. High Cleanliness Ultrasonic Cleaning Technics of Optics before Coating[J]. Laser & Optoelectronics Progress, 2010, 47(3): 32401 Copy Citation Text show less
    References

    [1] E. Maisonhaute,C. Prado,P. C. White et al.. Surface acoustic cavitation understood via nanosecond electrochemistry. Part III:shear stress in ultrasonic cleaning[J]. Ultrason. Sonochem.,2003,9(6):297-303

    [2] Q. Qi,G. J. Brereton. Mechanisms of removal of micron-sized particles by high-frequency ultrasonic waves[J]. IEEE Trans. Ultrason. Ferroelectrics Freq. Contr.,1995,42(4):619-629

    [3] S. Shwartzman,A. Mayer,W. Kem. Megasonic partical removal from solid-state wafers[J]. RCA Rev,1985,46(1):81-105

    [4] Jin O. Kim,S. Choi,J. Ho Kim. Vibroacoustic characteristics of ultrasonic cleaners[J]. Appl. Acoust.,1999,58(2):211-228

    [5] Fang Qiping,Lin Zhongmao. Megasonic cleaning——a new technologyof ultrasonic cleaning[J]. Chemical Cleaning,1998,14(2):31-32

    Hu Jiangchuan, Liu Xialai, Qiu Fuming, Guo Bo, Yan Dingyao, Yang Liming. High Cleanliness Ultrasonic Cleaning Technics of Optics before Coating[J]. Laser & Optoelectronics Progress, 2010, 47(3): 32401
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