Author Affiliations
School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, Chinashow less
Fig. 1. Relationship between contributions of coma and astigmatism to diffuse spot and field of view
Fig. 2. Flow chart of proposed method
Fig. 3. Layout of designed optical system
Fig. 4. Wavefront aberration at each field of view. (a)(b) 0°; (c)(d) 0.38°; (e)(f) 0.53°; (g)(h) 0.75°
Fig. 5. Diffuse spot at each field of view. (a)(b) 0°; (c)(d) 0.38°; (e)(f) 0.53°; (g)(h) 0.75°
Fig. 6. PSF comparison results of different models. (a) PSF calculated by Zemax software; (b) PSF calculated by proposed model
Fig. 7. Comparison of results before and after simulated imaging restoration. (a)(c) Simulated image and its partial enlarged view; (b)(d) restoration image and its partial enlarged view
Fig. 8. Comparison of results before and after imaging restoration of resolution plate. (a)(c)(e) Simulation image of resolution plate and its partial enlarged views; (b)(d)(f) restoration image and its partial enlarged views
Fig. 9. MTF comparison of each region in Fig. 8 before and after restoration. (a) MTF of each region before restoration; (b) MTF of each region after restoration
Term | Zernike polynomial | Name |
---|
| 1 | Piston | | Rcos θ | X-tilt | | Rsin θ | Y-tilt | | 2R2-1 | Defocus | | R2cos(2θ) | 0° astigmatism | | R2sin(2θ) | 45° astigmatism | | (3R3-2R)cos θ | X-coma | | (3R3-2R)sin θ | Y-coma | | 6R4-6R2+1 | Sphere |
|
Table 1. First nine terms of fringe Zernike polynomial
Parameter | Content |
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Focal length /mm | 470 | F-number | 5.5 | Wavelength /nm | 900--1700 | Field of view /(°) | 1.5 |
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Table 2. Design specifications of system
j | Y field | bj | cj |
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1 | 0 | 0.0084 | 0.0034 | 2 | 0.039 | 0.2283 | 0.0986 | 3 | 0.094 | 0.5532 | 0.2635 | 4 | 0.188 | 1.1232 | 0.5525 | 5 | 0.281 | 1.6602 | 0.8045 | 6 | 0.375 | 2.2199 | 1.0885 | 7 | 0.469 | 2.7548 | 1.3410 | 8 | 0.563 | 3.2861 | 1.6002 | 9 | 0.656 | 3.8326 | 1.8374 | 10 | 0.750 | 4.3808 | 2.1167 |
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Table 3. Fitting coefficients for sampling points