Surface-enhanced Raman Spectroscopy (SERS) was a rapid non-destructive testing.It was based on detecting molecule vibrational spectrum which was adsorbed on the metallic surface. Now it was widely used in surface adsorption, electrochemical catalysis, sensors, bio-medical testing, trace amount analysis and other fields. In our experiment, copper metallic films were deposited 50nm on BK7 glass substrates by direct current magnetron sputtering. And then the films were employed for the Ar ion beam etching modification.The structure, morphology and optical properties was characterized by X-ray diffraction (XRD), Atomic Force Microscope (AFM), spectrophotometer and Raman spectroscopy.In the XRD graph, the peak value of modify copper film were the same with the untreated film. So the structure of copper film was not change.With increasing the power of Ar ion, the surface roughness was changed, and scattered spectrum intensity was increased by surface roughness added. With Rhodamine B(Rh B) as a probe molecule, Raman scattered spectrum was detected on modify copper film.Compared with the different samples, we can find the Raman signal was enhanced by surface roughness added. It will have some value on study the principles of SERS.