• Chinese Journal of Lasers
  • Vol. 22, Issue 1, 9 (1995)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography[J]. Chinese Journal of Lasers, 1995, 22(1): 9 Copy Citation Text show less

    Abstract

    A second-harmonic of a copper vapor laser whichis output from an oscillatoramplifer system with a self-fliering unstable resonator is generated in BBO crystal by a line focus. The conversion efficiency reached 14.4% at 5.4 W fundamental power. A pattern of 1.0 μm lines and spases is resolved by contact photolithography on 255.3 urn line for the first time.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography[J]. Chinese Journal of Lasers, 1995, 22(1): 9
    Download Citation