• Acta Optica Sinica
  • Vol. 31, Issue 6, 612003 (2011)
Wang Daodang*, Yang Yongying, Chen Chen, and Zhuo Yongmo
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201131.0612003 Cite this Article Set citation alerts
    Wang Daodang, Yang Yongying, Chen Chen, Zhuo Yongmo. Calibration of Oblique-Reflection Aberration in Point-Diffraction Interferometer for High-Precision Spherical Surface Testing[J]. Acta Optica Sinica, 2011, 31(6): 612003 Copy Citation Text show less

    Abstract

    Based on the polarization effect of metal-dielectric reflector in the point-diffraction interferometer for high-precision spherical surface testing, the oblique-reflection wavefront aberration of beams with different polarizaed states at various aperture angles is analyzed in detail. According to the numerical simulation result, the characteristic of oblique-reflection phase shift introduced by metal-dielectric reflector is studied, based on which the corresponding calibration method is presented. The experimental validation with the point-diffraction interferometer for high-precision spherical surface testing is carried out. Experimental results indicate that the metal-dielectric reflector introduces various effects on the beams with different polarized states, and the oblique-reflection wavefront aberration can be calibrated by the proposed method, with the residual error peak-valley (PV) value dropping from 0.0452λ to 0.0194λ and root mean square (RMS) value from 0.0075λ to 0.0021λ (λ is wavelength).
    Wang Daodang, Yang Yongying, Chen Chen, Zhuo Yongmo. Calibration of Oblique-Reflection Aberration in Point-Diffraction Interferometer for High-Precision Spherical Surface Testing[J]. Acta Optica Sinica, 2011, 31(6): 612003
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