Fig. 1. Self-traceable grating structure image. (a) 2D plane image; (b) 3D structural image

Fig. 2. Schematic diagram of hBN/self-traceable grating structure

Fig. 3. (a) nano-FTIR spectra of hBN/self-traceable grating structure; (b) nano-FTIR spectra of hBN/self-traceable grating structure at the grating ridge and grating groove

Fig. 4. (a) Sample testing equipment, BRUKER Company’s nanoscale infrared spectrometer Anasys nanoIR3-s, with 10 nm spatial resolution; (b) Near-field optical imaging of the sample, where the blue color represents the region of the hBN/self-traceable grating structure, and the yellow color represents the region of the self-traceable grating; (c) Atomic Force Microscopy imaging of the surface structure of the sample

Fig. 5. A comparative study of AFM and SNOM images of hBN/grating composite structures with different scanning ranges. (a)-(c) AFM imaging of the sample surface morphology (The imaging sizes are 1 µm×1 µm, 5 µm×5 µm, and 10 µm×10 µm, respectively); (d)-(f) Near-field optical imaging of the sample corresponding to the previous images (The imaging sizes are the same as mentioned above)

Table 1. Measurement of interference fringe period in images with different scanning ranges