Shaodong Ping, Yunxia Fu, Feng Zhang, Yu Ren, Ming Kong. Study on measurement method of mirror reflection laser tracking interferometric length measurement[J]. Infrared and Laser Engineering, 2021, 50(12): 20210624
- Infrared and Laser Engineering
- Vol. 50, Issue 12, 20210624 (2021)
Fig. 1. Model of laser tracking interferometric length measurement
Fig. 2. Principle of mirror reflection laser tracking interferometric length measurement
Fig. 3. Plane mirror deviation
Fig. 4. Correspondence between
and
与
的对应关系
Fig. 5. Flatness error
Fig. 6. Variation trend of
with
随
的变化规律
Fig. 7. Variation of
with different length
随不同长度的变化规律
Fig. 8. Length standard measurement experiment
Fig. 9. Length deviation and uncertainty of measurement
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Table 1. E n verification result
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Table 2. Angle adjustment verification result
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