• Acta Optica Sinica
  • Vol. 5, Issue 5, 461 (1985)
ZHOU JIULIN
Author Affiliations
  • [in Chinese]
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    ZHOU JIULIN. Measurement of refractive-index dispersion of transparent films[J]. Acta Optica Sinica, 1985, 5(5): 461 Copy Citation Text show less

    Abstract

    Combining a single-wavelength ellipsometer with a spectrophotometer, we propose a method to measure refractive indices of dielectric films at any wavelength. "With phase thickness of the thin film properly selected, the error of the measurement may be as low as <1×10-2, enough for the usual thin-film design and deposition.