• Acta Optica Sinica
  • Vol. 34, Issue s1, 104001 (2014)
Yang Lechen1、2、3、*, Fu Kai2、3, Shi Xueshun1、4, Chen Kunfeng1, Li Ligong1、4, and Zhang Baoshun2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • show less
    DOI: 10.3788/aos201434.s104001 Cite this Article Set citation alerts
    Yang Lechen, Fu Kai, Shi Xueshun, Chen Kunfeng, Li Ligong, Zhang Baoshun. Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector[J]. Acta Optica Sinica, 2014, 34(s1): 104001 Copy Citation Text show less

    Abstract

    AlGaN/GaN heterostructure metal-semiconductor-metal (MSM) structure ultraviolet (UV) photodetector with Ni/Au electrodes is fabricated. Opto-electrical characteristics and current-voltage characteristics of the detector are investigated. It is found that the detector has two spectral response ranges. The peak response is 0.717 A/W at 288 nm and 0.641 A/W at 366 nm. The quantum efficiency is 308% at 288 nm and 217% at 366 nm.
    Yang Lechen, Fu Kai, Shi Xueshun, Chen Kunfeng, Li Ligong, Zhang Baoshun. Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector[J]. Acta Optica Sinica, 2014, 34(s1): 104001
    Download Citation