Zhe ZHANG, Shengzhen YI, Qiushi HUANG, Shenghao CHEN, Wenbin LI, Zhong ZHANG, Zhanshan WANG. Research progress of normal-incidence optical system at extreme ultraviolet （EUV） wavelength[J]. Optics and Precision Engineering, 2022, 30(21): 2678
- Optics and Precision Engineering
- Vol. 30, Issue 21, 2678 (2022)
Fig. 1. Schematic of SILEX-I laser facility［6］
Fig. 2. Result of Schwarzschild imaging system diagnostics
Fig. 3. Schematic diagram of Schwarzschild imaging system working at 13.5 nm［18］
Fig. 4. Best imaging figure and evaluation of spatial resolution［18］
Fig. 5. （a） Comparison of results between simulation and experiment at different object distances； （b） Best object points are imaged ten times
Fig. 6. Schematic of modified Schwarzschild focusing system［31］
Fig. 7. Schematic diagram of EUV radiation induced damage test platform
Fig. 8. Absolute EUV pulse energy and EUV energy density as a function of inflated gas pressure［19］
Fig. 9. AFM image of PMMA irradiated area by EUV radiation［19］
Fig. 10. Optical path of imaging experiments for four-channel system［17］
Fig. 11. EUV images obtained by four-channel imaging system
Fig. 12. Schematic of six-channel Schwarzschild system
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20