• Journal of Infrared and Millimeter Waves
  • Vol. 38, Issue 2, 223 (2019)
LI Hao1、2、*, LIN Chun1, ZHOU Song-Min1, WANG Xi1, and SUN Quan-Zhi1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2019.02.016 Cite this Article
    LI Hao, LIN Chun, ZHOU Song-Min, WANG Xi, SUN Quan-Zhi. HgCdTe avalanche photo diode fabricated by ion beam etching[J]. Journal of Infrared and Millimeter Waves, 2019, 38(2): 223 Copy Citation Text show less

    Abstract

    HgCdTe avalanche photo diode (APD) is one of the developing trends of third generation infrared FPA detectors. This article presents a new method to fabricate HgCdTe APD by ion beam etching (IBE), and discusses the relation of gain to cutoff wavelength and depletion region thickness. A gain of 1000 at a bias of 17 V and a cutoff wavelength of 4.8 μm was achieved. The excess noise factor, F, is calculated after a noise spectrum test.
    LI Hao, LIN Chun, ZHOU Song-Min, WANG Xi, SUN Quan-Zhi. HgCdTe avalanche photo diode fabricated by ion beam etching[J]. Journal of Infrared and Millimeter Waves, 2019, 38(2): 223
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