Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301
- Chinese Optics Letters
- Vol. 13, Issue 5, 051301 (2015)
Fig. 1. Schematic diagram of the system configuration. C, collimator.
Fig. 2. Schematic diagram of signal processing module.
Fig. 3. Measurement system; (a) schematic diagram of the measurement system; (b) picture of the prototype of the measurement system. HPI, Hewlett Packard interferometer; LS, laser source; PC, personal computer.
Fig. 4. Grating images; (a) by Zygo New View 700; (b) by SEM.
Fig. 5. Output of three interference signals.
Fig. 6. Comparison measurement result of the 10 mm round-trip; (a) original displacement difference; (b) linear fitting and residual error for the forward movement; (c) linear fitting and residual error for the backward movement. Disp, displacement.
Fig. 7. Comparison measurement result of 200 μm movement; (a) original displacement difference; (b) linear fitting and residual error for the movement.
Fig. 8. Stability test results; (a) the system stability measurement results for our system and HP5530 for 300 s; (b) Allan deviation analysis of the measurement data.
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20