• Chinese Optics Letters
  • Vol. 13, Issue 5, 051301 (2015)
Chunhua Wei, Shuhua Yan*, Cunbao Lin, Zhiguang Du, and Guochao Wang
Author Affiliations
  • College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
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    DOI: 10.3788/COL201513.051301 Cite this Article Set citation alerts
    Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301 Copy Citation Text show less

    Abstract

    We present a compact displacement measurement system possessing the capability of nanometer-scale precision. On basis of integrating single grating with 3×3 coupler for phase shift in interference signal, the present scheme features advantages of simple structure, convenient alignment, and insensitivity to air turbulence. Linear comparisons between our system and HP5530 show a residual error less than 81 nm during step motions along a 10 mm round-trip, and a discrepancy less than 15 nm in the case of 200 μm movement. We also demonstrate a measurement stability test in a duration of 300 s, which shows the proposed scheme potentially performs better than HP5530 in terms of long-term stability.
    {νP,1=ν0·ccVsiniP,1νQ,1=ν0·ccVsiniQ,1.(1)

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    Δν=νP,1νQ,12Vd.(2)

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    N=0TΔνdt=2d0TVdt=2dS,(3)

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    S=N·d2.(4)

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    {a=A1cosθb=A2cos(θ+120°+Δφ2)c=A3cos(θ+240°+Δφ3),(5)

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    θ=atan{a[A2cos(120°+Δφ2)A3cos(240°+Δφ3)](bc)A1a[A2sin(120°+Δφ2)A3sin(240°+Δφ3)]}.(6)

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    Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301
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