• Acta Optica Sinica
  • Vol. 36, Issue 3, 306002 (2016)
Chen Lu*, Zhu Jiali, Li Zeyan, and Wang Ming
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201636.0306002 Cite this Article Set citation alerts
    Chen Lu, Zhu Jiali, Li Zeyan, Wang Ming. Optical Fiber Fabry-Perot Pressure Sensor Using Corrugated Diaphragm[J]. Acta Optica Sinica, 2016, 36(3): 306002 Copy Citation Text show less

    Abstract

    A novel optical fiber Fabry- Perot pressure sensor using a corrugated diaphragm is presented. The mechanical model of corrugated diaphragm is analyzed and the parameters are optimized by simulation. The structures of the sensor and the production methods are elaborated. Pressure tests are carried out by employing the micro-pressure sensor testing system. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity and repeatability in the range of 0 to 0.1 MPa.
    Chen Lu, Zhu Jiali, Li Zeyan, Wang Ming. Optical Fiber Fabry-Perot Pressure Sensor Using Corrugated Diaphragm[J]. Acta Optica Sinica, 2016, 36(3): 306002
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