• Chinese Journal of Lasers
  • Vol. 46, Issue 3, 0313001 (2019)
Quan Liu1、2、3、*, Jianhong Wu1、2、3, Peiliang Guo1, and Xinhua Chen1、2、3
Author Affiliations
  • 1 School of Optoelectronic Science and Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, Jiangsu 215006, China
  • 2 Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou, Jiangsu 215006, China
  • 3 Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, Jiangsu 215006, China
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    DOI: 10.3788/CJL201946.0313001 Cite this Article Set citation alerts
    Quan Liu, Jianhong Wu, Peiliang Guo, Xinhua Chen. Fabrication of Convex Blazed Grating with High Diffraction Efficiency[J]. Chinese Journal of Lasers, 2019, 46(3): 0313001 Copy Citation Text show less

    Abstract

    The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis. The convex blazed grating with a central period of 2.45 μm, a curvature radius of 51.64 mm, and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method. The blazed angle is 6.4°, and the vertex angle is 141°. The results show that the first-order diffraction efficiency of the proposed grating is greater than 40% in the whole visible and near-infrared band, and the first-order diffraction efficiency at blaze wavelength is greater than 75%.
    Quan Liu, Jianhong Wu, Peiliang Guo, Xinhua Chen. Fabrication of Convex Blazed Grating with High Diffraction Efficiency[J]. Chinese Journal of Lasers, 2019, 46(3): 0313001
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