Soft X-Ray Contact Microscopy by an Atomic Force Microscope

Jiang Shiping; Zhang Yuxuan; Gao Hongyi; Chen Jianwen; Zhang Xinyi; Xu Zhizhan

Journals >Acta Optica Sinica >Volume 22 >Issue 1 >Page 118 > Article

Acta Optica Sinica
Vol. 22, Issue 1, 118 (2002)

Soft X-Ray Contact Microscopy by an Atomic Force Microscope

Jiang Shiping^1、2, Zhang Yuxuan³, Gao Hongyi², Chen Jianwen², Zhang Xinyi¹, and Xu Zhizhan²

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

show less

DOI: Cite this Article Set citation alerts

Jiang Shiping, Zhang Yuxuan, Gao Hongyi, Chen Jianwen, Zhang Xinyi, Xu Zhizhan. Soft X-Ray Contact Microscopy by an Atomic Force Microscope[J]. Acta Optica Sinica, 2002, 22(1): 118 Copy Citation Text

show less

Abstract

The instruments for reading relief in the photoresist related with the resolutions of soft X-ray contact microimaging are described. Comparing the micrographs made by an atomic force microscope with that by optical microscopes experimentally, the conclusion can be drawn that the atomic force microscope is a very good method for amplifying the images in the resists.

Keywords

atomic force microscope contact imaging soft X-ray

Jiang Shiping, Zhang Yuxuan, Gao Hongyi, Chen Jianwen, Zhang Xinyi, Xu Zhizhan. Soft X-Ray Contact Microscopy by an Atomic Force Microscope[J]. Acta Optica Sinica, 2002, 22(1): 118

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information