Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings

LIN Yu-hua; HE Ming-xia; LAI Hui-bin; LI Peng-fei; MA Wen-he

doi:10.3964/j.issn.1000-0593(2017)11-3332-06

Journals >Spectroscopy and Spectral Analysis >Volume 37 >Issue 11 >Page 3332 > Article

Spectroscopy and Spectral Analysis
Vol. 37, Issue 11, 3332 (2017)

Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings

LIN Yu-hua^1、2、*, HE Ming-xia^1、2, LAI Hui-bin^1、2, LI Peng-fei^1、2, and MA Wen-he^1、2

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2017)11-3332-06 Cite this Article

LIN Yu-hua, HE Ming-xia, LAI Hui-bin, LI Peng-fei, MA Wen-he. Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings[J]. Spectroscopy and Spectral Analysis, 2017, 37(11): 3332 Copy Citation Text

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References

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[6] Iwata T, Uemura H, Mizutani Y, et al. Optics Express, 2014, 22(17): 20595.

[7] Uemura H, Yasui T, Lwata T, et al. Optics Express, 2014, 22(17): 20595.

[8] Iwata T, Yoshioka S, Nakamura S, et al. Journal of Infrared Millimeter & Terahertz Waves, 2013, 34(10): 646.

[9] Su K, Shen Y C, Zeitler J A. IEEE Transactions on Terahertz Science & Technology, 2014, 4(4): 432.

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