Fig. 1. Schematic of freeform micro-lens measurement system based on computer-aided deflectometry

Fig. 2. Flow chart for micro-lens multisurface testing based on deflectometry

Fig. 3. Schematic of the system ray tracing model

Fig. 4. Reconstruction results of micro-lens double-surfaces. (a) Original wavefront; (b) wavefront at the Tx10°; (c) wavefront at the Ty10°; (d) wavefront at the flip position; (e) nominal front surface of tested micro-lens; (f) nominal rear surface of tested micro-lens; (g) reconstructed front surface of tested micro-lens; (h) reconstructed rear surface of tested micro-lens; (i) residual error of front surface; (j) residual error of rear surface

Fig. 5. Photo of experiment system and micro-lens

Fig. 6. Reconstruction results of micro-lens double-surfaces in the experiment. (a) Acquired fringes in x direction at the original position; (b) acquired fringes in x direction at the Tx10°; (c) acquired fringes in x direction at the Ty10°; (d) acquired fringes in x direction at the flip position; (e) transmitted wavefront at the original position; (f) transmitted wavefront at the Tx10°; (g) transmitted wavefront at the Ty10°; (h) transmitted wavefront at the flip position; (i) reconstructed front surface of tested micro-lens; (j) reconstructed rear surface of tested micro-lens; (k) measured front surface of tested micro-lens by Zygo interferometer; (l) measured rear surface of tested micro-lens by Zygo interferometer

Table 1. Comparison of Zernike fringe coefficients of experiment