Chen Ni, Yan Bo, Li Zhenjun, Li Liang, He Ning. Gaussian Pulsed Laser Etching of CVD Diamonds[J]. Chinese Journal of Lasers, 2020, 47(12): 1202007
- Chinese Journal of Lasers
- Vol. 47, Issue 12, 1202007 (2020)
Fig. 1. Schematic of device for nanosecond laser processing of CVD diamonds
Fig. 2. Simulation temperature cloud after single pulse. (a) Horizontal direction; (b) vertical direction
Fig. 3. Effect of laser power on etching surface pit morphology. (a) 3W; (b) 4W; (c) 5W; (d) 7W
Fig. 4. Raman spectra
Fig. 5. Morphology of etching pit. (a) Optical morphology; (b) Gaussian fitting of profile
Fig. 6. Effect of scanning speed on pulse spot overlapping during laser line etching. (a) Relatively small scanning speed; (b) relatively large scanning speed
Fig. 7. Laser line etching energy density model
Fig. 8. Line etching widths and side etching depths under different laser scanning speeds. (a) 50mm·s-1; (b) 20mm·s-1; (c) 0.2mm·s-1
Fig. 9. Effect of laser power on line etching width. (a) 3W; (b) 7W; (c) 15W
Fig. 10. Effect of laser power on side surface line etching depth. (a) 3W; (b) 7W; (c) 15W
Fig. 11. SEM image of laser etched CVD diamond surface. (a) Surface; (b) side surface
|
Table 1. Main parameters of pulsed Ytterbium-doped fiber laser
|
Table 2. Experimental parameters of laser point etching
|
Table 3. Experimental parameters of laser line etching
|
Table 4. Gaussian fitting results of etching profiles under different laser powers
|
Table 5. Gaussian fitting results of etching profiles under different numbers of pulses
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20