32&#215;32 pixel planar InGaAs/InP detector with response extended to visible wavelength band

YANG Bo; SHAO Xiu-Mei; TANG Heng-Jing; DENG Hong-Hai; LI Xue; WEI Peng; WANG Yun-Ji; LI Tao; GONG Hai-Mei

doi:10.11972/j.issn.1001-9014.2015.03.006

[1] Howard W Yoon, Matt C Dopkiss, George P Eppeldauer. Performance Comparisons of InGaAs, extended InGaAs and Short-wave HgCdTe Detectors between 1μm and 2.5μm: Infrared Spaceborne Remote Sensing XIV, 2006［C］.San Diego: Marija Strojnik, 2006: 6297031~10.

[2] Tara Martin, Peter Dixon, Mari Anne Gagliardi. 320×240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging: Semiconductor Photodetectors II, 2005［C］.Bellingham: Marshall J Cohen, Eustace L Dereniak, 2005: 85-91.

[3] Tara Martin, Robert Brubaker, Peter Dixon. 640×512 InGaAs focal plane array camera for visible and SWIR imaging: Infrared Technology and Applications XXXI, 2005［C］. Bjorn F Andersen, Gabor F Fulop, 2005: 12-20.

[4] Battaglia J, Blessinger M, Enriquez M, et al. An uncooled 1280 × 1024 InGaAs focal plane array for small platform, shortwave infrared imaging: Infrared Technology and Applications XXXV, 2009［C］: Bjorn F Andersen, Gabor F Fulop, 2009: 72983C-1~8.

[5] Henry Yuan, Gary Apgar, Jongwoo Kim, et al.FPA Development: from InGaAs, InSb, to HgCdTe: Infrared Technology and Applications XXXIV, 2008［C］: Bjorn F Andersen, Gabor F Fulop, 2008: 69403C-1~11.

[6] Honghai Deng, Hengjing Tang, Tao Li, et al.The temperature-dependent photoresponse uniformity of InGaAs sub-pixels infrared detector by LBIC technique ［J］. Semiconductor Science and Technology, 2012, 27(115018): 1-5.

[7] Emziane M, Nicholas R J. Optimization of InGaAs(P) photovoltaic cells lattice matched to InP ［J］, J. Appl.Phys., 2007, 101: 054503.

[8] Lal R, Jain M, S Gupta, P Chakrabarti. An analytical model of a double hetero-structure mid-infrared photodetector ［J］, Infrared. Phys. Technol., 2003, 44: 125-132.