• Acta Physica Sinica
  • Vol. 69, Issue 16, 165201-1 (2020)
Li-Tuo Liu1、*, Chun-Long Wang2, Xiao-Ya Yu3, Jun-Kai Shi1, Yao Li1, Xiao-Mei Chen1, and Wei-Hu Zhou1
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2Liberation Army 32180, Beijing 100012, China
  • 3Key Laboratory of Experimental Physics and Computational Mathematics, Beijing 100094, China
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    DOI: 10.7498/aps.69.20200517 Cite this Article
    Li-Tuo Liu, Chun-Long Wang, Xiao-Ya Yu, Jun-Kai Shi, Yao Li, Xiao-Mei Chen, Wei-Hu Zhou. Study of nano particle stripping and composition inspection on wafer surface[J]. Acta Physica Sinica, 2020, 69(16): 165201-1 Copy Citation Text show less
    References

    [1] Zapka W, Ziemlich W[J]. Appl. Phys. Lett., 58, 2217(1991).

    [2] Hsu S C, Lin J[J]. Optics & Laser Technol., 38, 544(2006).

    [3] Arnold N[J]. Appl. Surf. Sci., 208, 15(2003).

    [4] Grojo D, Cos A, Delaporte P, Sentis M[J]. Appl. Phys. B, 84, 517(2006).

    [5] Mosbacher M, Münzer H J, Zimmermann J, Solis J, Boneberg J, Leiderer P[J]. Appl.Phys. A, 72, 41(2001).

    [6] Mosbacher M, Dobler V, Bertsch M, Munzer J, Boneberg J, Leiderer P[J]. Surf. Contam. Clean., 1, 17(2003).

    [7] Seo C, Shin H, Kim D.[J]. Laser Technol.: Applications in Adhesion and Related Areas, 379-416(2018).

    [8] Wu D J, Xu Y, Wang X Y, Kang R K, Si M Y, Hu L Z[J]. Optics and Precision Engineering, 14, 765(2006).

    [9] Tan D H, Lu D S, Song W D, Fan Y C, An C W[J]. Laser Technol., 19, 319(1995).

    [10] Tan D H, Lu D S, Song W D, An C W[J]. J. Huazhong Univ. Sci. Technol., 24, 50(1996).

    [11] Meredith B, Scott A[J]. Microelectron. Eng., 87, 1701(2010).

    [12] [J].

    [13] Chakraborty S, Luz Manalo M, Moideen Ali J, Armin G, Joel B[J]. 7th international Conference on Silicon Photovoltaics, SiliconPV Freiburg, 24(2017).

    [14] Ferlito E P, Alnabulsi S, Mello D[J]. Appl. Surf. Sci., 257, 9925(2011).

    [15] Polignano M L, Borionetti G, Galbiati A, Grasso S, Mica I, Nutsch A[J]. Spectrochim. Acta, Part B, 2, 117(2018).

    [16] Ohno R, Saga K[J]. Solid State Phenom., 282, 309(2018).

    [17] Danel A, Sage S, Barnes J P, Peters D, Spicer R, Bryant R, Newcomb R[J]. Microelectron. Eng., 86, 186(2009).

    [18] Budri T[J]. Appl. Surf. Sci., 254, 4768(2008).

    [19] Zanderigo F, Ferrari S, Queirolo G, Pello C, Borgini M[J]. J. Mater. Sci. Eng.B, 73, 173(2000).

    [20] Yang C K, Chi P H, Lin Y C, Sun Y C, Yang M H[J]. Talanta, 80, 1222(2010).

    [21] Rostam-Khani P, Hopstaken M J P, Vullings P, Noij G, Halloran O O, Claassen W[J]. Appl. Surf. Sci., 231, 720(2004).

    [22] Salvatore A, Luisa C, Francesco C, Violeta L, Giorgio M, Pierandrea M, Antonio P, Andrea R, Pawel G, Wojciech G, Monika K[J]. Fusion Eng. Des., 157, 111685(2020).

    [23] Millar S, Kruschwitz S, Wilsch G[J]. Cem. Concr. Res., 117, 16(2019).

    [24] Guo L B, Cheng X T, Yun T, Shi S H, Zhong Q L, Lu X Y, Zeng Y F, Xiao Y[J]. Spectrochim. Acta, Part B, 152, 38(2019).

    [25] Xian H, Bakker M C M[J]. Talanta, 120, 239(2014).

    [26] Davari S A, Taylor P A[J]. Talanta, 18, 192(2019).

    [27] Romero D, Romero J M F, Laserna J J[J]. J. Anal. At. Spectrom, 14, 199(1999).

    Li-Tuo Liu, Chun-Long Wang, Xiao-Ya Yu, Jun-Kai Shi, Yao Li, Xiao-Mei Chen, Wei-Hu Zhou. Study of nano particle stripping and composition inspection on wafer surface[J]. Acta Physica Sinica, 2020, 69(16): 165201-1
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