CMOS compatible multichannel mid-infrared photonic crystal sensor

Yi ZHOU; Lei WANG; Jun LI; Xue-Lei YANG; Feng-Yuan GAN; Ying-Xuan ZHAO; Chao QIU; Wei LI

doi:10.11972/j.issn.1001-9014.2020.03.002

Journals >Journal of Infrared and Millimeter Waves >Volume 39 >Issue 3 >Page 279 > Article

Journal of Infrared and Millimeter Waves
Vol. 39, Issue 3, 279 (2020)

CMOS compatible multichannel mid-infrared photonic crystal sensor

Yi ZHOU, Lei WANG, Jun LI, Xue-Lei YANG, Feng-Yuan GAN, Ying-Xuan ZHAO, Chao QIU, and Wei LI

Author Affiliations

Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai200050, China

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DOI: 10.11972/j.issn.1001-9014.2020.03.002 Cite this Article

Yi ZHOU, Lei WANG, Jun LI, Xue-Lei YANG, Feng-Yuan GAN, Ying-Xuan ZHAO, Chao QIU, Wei LI. CMOS compatible multichannel mid-infrared photonic crystal sensor[J]. Journal of Infrared and Millimeter Waves, 2020, 39(3): 279 Copy Citation Text

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Abstract

We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal (PhC) slab. The device is composed of four cavities with a center wavelength at 3.3μm, and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain (FDTD) method. The transmittance of each channel is about 39%, with non-uniformity of transmittance across channels less than 0.25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solutions, and shows a sensitivity of 209.2nm/RIU.

Keywords

mid-infrared multichannel photonic crystal sensor