Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang. Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique[J]. Chinese Optics Letters, 2015, 13(12): 122301
- Chinese Optics Letters
- Vol. 13, Issue 12, 122301 (2015)
Fig. 1. Measured refractive indexes of Ta 2 O 5 SiO 2
Fig. 2. Transmission spectra with different thicknesses of the resonant cavity.
Fig. 3. Fabrication process flow of the designed LVOF.
Fig. 4. Schematic diagram of ion beam etching.
Fig. 5. Schematic diagram of sample and mask.
Fig. 6. Schematic diagram of sample and split.
Fig. 7. Measured transmission spectra at different positions.
Fig. 8. Relationship between position and peak wavelength.
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