Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique

Bin Sheng; Peng Chen; Chunxian Tao; Ruijin Hong; Yuanshen Huang; Dawei Zhang

doi:10.3788/COL201513.122301

Journals >Chinese Optics Letters >Volume 13 >Issue 12 >Page 122301 > Article

Chinese Optics Letters
Vol. 13, Issue 12, 122301 (2015)

Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique

Bin Sheng, Peng Chen^*, Chunxian Tao, Ruijin Hong, Yuanshen Huang, and Dawei Zhang

Author Affiliations

Engineering Research Center of Optical Instruments and Systems, Ministry of Education and Shanghai Key Laboratory of Modern Optical Systems, University of Shanghai for Science and Technology, Shanghai 200093, China

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DOI: 10.3788/COL201513.122301 Cite this Article Set citation alerts

Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang. Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique[J]. Chinese Optics Letters, 2015, 13(12): 122301 Copy Citation Text

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