Computer Aided Modeling for a Miniature Silicon-on-Insulator MEMS Piezoresistive Pressure Sensor

[in Chinese]; [in Chinese]

doi:10.1007/s13320-015-0239-y

[1] Y. Zhang, C. Yang, Z. Zhang, H. Lin, L. Liu, and T. Ren, “A novel pressure micro sensor with 30-μm-thick diaphragm and meander-shaped piezoresistors partially distributed on high-stress bulk silicon region,” IEEE Sensors Journal, 2007, 7(12): 1742-1748.

[2] L. Lin and W. Yun, “MEMS pressure sensors for aerospace applications,” IEEE Aerospace Conference, 1998, 1: 429-436.

[3] B. Folkmer, P. Steiner, and W. Lang, “A pressure sensor based on a nitride membrane using singlecrystalline piezoresistors,” Sensors and Actuators A: Physical, 1996, 54(1-3): 488-492.

[4] A. Berns, U. Buder, E. Obermeier, A. Wolter, and A. Leder, “Aero MEMS sensor array for high-resolution wall pressure measurements,” Sensors and Actuators A: Physical, 2006, 132(1): 104-111.

[5] A. Wisitsoraat, V. Patthanasetakul, T. Lomas, and A. Tuantranont, “Low cost, thin film based piezoresistive MEMS tactile sensor,” Sensors and Actuators A: Physical, 2007, 139(1-2): 17-22.

[6] R. E. Oosterbroek, T. S. J. Lammerink, J. W. Berenschot, G. J. M. Krijnen, M. C. Elwenspoek, and A. V. D. Berg, “A micromachined pressure/flow-sensor,” Sensors and Actuators A: Physical, 1999, 77(3): 167-177.

[7] P. D. Dimitropoulos, C. Kachris, D. P. Karampatzakisa, and G. I. Stamoulis, “A new SOI monolithic capacitive sensor for absolute and differential pressure measurements,” Sensors and Actuators A: Physical, 2005, 123-124: 36-43.

[8] L, Chen and M. Mehregany, “A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement,” Sensors and Actuators A: Physical, 2008, 145-146: 2-8.

[9] K. J. Suja, B. P. Chaudhary, and R. Komaragiri, “Design and simulation of pressure sensor for ocean depth measurement,” Applied Mechanics and Materials, 2013, 313-314: 666-670.

[10] Y. Kanda and A. Yasukawa, “Optimum design considerations for silicon piezoresistive pressure sensors,” Sensors and Actuators A: Physical, 1997, 62(1-3): 539-542.

[11] K. Sakurano, H. Katoh, Y. Chun, and H. Watanabe, “Operation of a work function type SOI temperature sensor up to 250AC,” in IEEE International SOI Conference Proceedings 2007, Osaka, Japan, pp.149-150, 2007.

[12] R. Sathishkumar, A. Vimalajuliet, J. S. Prasath, K. Selvakumar, and S. V. Reddy, “Micro size ultrasonic transducer for marine applications,” Indian Journal of Science and Technology, 2011, 4(1): 8-11.

[13] I. Obieta, E. Castano, and F. J. Gracia, “High temperature polysilicon pressure microsensor,” Sensors and Actuators A: Physical, 1995, 46(1-3): 161-165.

[14] S. Aravamudhan and S. Bhansali, “Reinforced piezoresistive pressure sensor for ocean depth measurements,” Sensors and Actuators A: Physical, 2008, 142(1): 111-117.

[15] M. Narayanaswamy, R. J. Daniel, K. Sumangala, and C. A. Jeyasehar, “Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensor,” Measurement, 2011, 44(10): 1924-1936.

[16] L. Zhao, C. Xu, and G. Shen, “Analysis for load limitation of square-shaped silicon diaphragms,” Solid-State Electronics, 2006, 50(9-10): 1579-1583.

[17] S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells. New York: McGraw-Hill, 1959: 16-20.

[18] Sreenath L.S, Advanced Solid Mechanics. New York: Tata MC Graw-Hill Education, 2001.