Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system

[in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 10 >Issue 4 >Page 374 > Article

Acta Optica Sinica
Vol. 10, Issue 4, 374 (1990)

Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system

[in Chinese] and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese]. Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system[J]. Acta Optica Sinica, 1990, 10(4): 374 Copy Citation Text

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Abstract

The composite retro-reflector system plays the role of the cubic corner retro-reflector on 2-D interferometric controlled precioion workstage. But it is liable to cause considerable additional optical path when it is yawing. The formulan for calculating the additional optical path are derived and the measures to reduce the error are discussed in this paper.

Keywords

additional optical path composite retro-reflector system

[in Chinese], [in Chinese]. Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system[J]. Acta Optica Sinica, 1990, 10(4): 374

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