• Acta Optica Sinica
  • Vol. 34, Issue 4, 428002 (2014)
Zhu Jiali*, Wang Ming, Cai Dongyan, and Jia Sheng
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201434.0428002 Cite this Article Set citation alerts
    Zhu Jiali, Wang Ming, Cai Dongyan, Jia Sheng. A Fiber Fabry-Perot Micro Pressure Sensor[J]. Acta Optica Sinica, 2014, 34(4): 428002 Copy Citation Text show less

    Abstract

    A novel fiber Fabry-Perot pressure sensor is presented, which is fabricated by photoetching, silicon etching, anodic bonding and other micro-electromechanical system technologies. It is suitable for micro-pressure measurement in harsh environments and confined spaces. The structure of the sensor and the production methods are elaborated. In this structure, with the help of fiber flange, the end face of fiber can be in parallel with sensitive membrane, thus a high quality Fabry-Perot interferometer cavity is formed. The structure is also conducive to the stability of the initial cavity length, reducing the sensor′s error. The demodulation system for the testing of pressure characteristics and temperature property is set up. Experimental results demonstrate that a high linear response in the range of 0 to 0.1 MPa is obtained in this sensor. The repeatability is good and the sensitivity reaches 61.6 μm/MPa.
    Zhu Jiali, Wang Ming, Cai Dongyan, Jia Sheng. A Fiber Fabry-Perot Micro Pressure Sensor[J]. Acta Optica Sinica, 2014, 34(4): 428002
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