Author Affiliations
1College of Flexible Electronics (Future Technology) & College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, Jiangsu , China2Bell Honors School, Nanjing University of Posts and Telecommunications, Nanjing 210023, Jiangsu ,Chinashow less
Fig. 1. Three-dimensional structure of download type electro-optic modulator with reflection wall
Fig. 2. Sectional drawing of electro-optic modulator
Fig. 3. Structural diagram of photonic crystal nanowire cavity
Fig. 4. Circular hole parameter diagram
Fig. 5. Theoretical model of side coupling structure between mainline waveguide and resonant cavity
Fig. 6. Theoretical transmittance spectrum of side coupling structure between mainline waveguide and resonant cavity
Fig. 7. Doping diagram of electro-optic modulator silicon-based materials
Fig. 8. Carrier concentration distributions when modulation voltage is 1.2 V. (a) N type carrier concentration;(b) P type carrier concentration
Fig. 9. Transmissivity and resonance wavelength versus Nreflect
Fig. 10. Transmissivity and resonance wavelength versus
Fig. 11. Transmissivity and Q value versus coupling distance L
Fig. 12. Stable light intensity distribution when incident wavelength is consistent with resonant wavelength
Fig. 13. Transmission spectra of modulator at “on” and “off” states
Fig. 14. Stable time at “on” state of modulator obtained by simulation calculation
Fig. 15. Stable time at “off” state of modulator obtained by simulation calculation
Fig. 16. 3 dB bandwidth of modulator obtained by simulation calculation
Fig. 17. Equivalent circuit of modulator
Device | Device area /µm2 | Extinction ratio /dB | Insertion loss /dB | Bias voltage /V | Q factor | Modulation bandwidth /GHz | Modulation frequency /GHz | Ref. |
---|
1D Fabry-Perot resonator | >6 | 5.87 | 5.1 | 4.8 | 780 | <10 | ‒ | [14] | 1D silicon photonic crystal | >10 | 11 | ‒ | >1.1 | 20000 | 59 | ‒ | [15] | Graphene-silicon hybrid | 20 | 12.5 | ‒ | 6.4 | 5000 | ~133 | ‒ | [16] | 1D silicon photonic crystal | 25 | 18.2 | 0.04 | 1.175 | 11000 | 90 | 8.3 | [18] | Multilayer stack | ‒ | <10 | ‒ | >5 | ~600 | ‒ | ‒ | [17] | Our device | 54 | 24 | 0.2 | 1.2 | 7110 | 122 | 8.7 | ‒ |
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Table 1. Performance comparison of nanowire cavity electro-optic modulators