• Acta Optica Sinica
  • Vol. 24, Issue 11, 1450 (2004)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering[J]. Acta Optica Sinica, 2004, 24(11): 1450 Copy Citation Text show less
    References

    [1] Thornton J A. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings. J. Vacuum Sci. Technol., 1974, 11(4):666~670

    [2] Thornton J A. The microstructure of sputter-deposited coatings. J. Vacuum Sci. Technol., 1986, A4(6): 3059~3065

    [3] Zywitzki O, Goedicke K, Morgner H. Structure and properties of Al2O3 layers deposited by plasma activated electron beam evaporation. Surface and Coatings Technol., 2002, 151~152: 14~20

    [4] Jeong Soo Lee, Byung Gil Ryu, Hyun Ja Kwon et al.. Texture and cross-sectional microstructure of MgO films grown on silicon dioxide by electron-beam evaporation. Thin Solid Films, 1995, 354(1~2): 82~86

    [5] Pearson J M. Electron microscopy of multiplayer thin films. Thin Solid Films, 1970, 6(5): 349~358

    [6] Xiong Deping, Zhang Xiqing, Wang Jing et al.. Optical properties of ZnO thin films on SiO2 substrates deposited by radio frequency magnetron sputtering. Chin. Opt. Lett., 2004, 3(3): 179~181

    [7] Lissberger P H, Pearson J M. The performance and structural properties of multiplayer optical filters. Thin Solid Films, 1976, 34(2): 349~355

    [8] Pulker H K, Jung E. Correlation between film structure and sorption behaviour of vapour deposited ZnS, cryolite and MgF2 films. Thin Solid Films, 1972, 9(1): 57~66

    [9] Müller K H. Models for ion-assisted thin film densification. J. Appl. Phys., 1996, 59(8): 2803~2807

    [10] Drüsedau T P, Neubert T, Panckow A N. The properties of aluminum oxide and nitride films prepared by d.c. sputter-deposition from metallic targets. Surface and Coatings Technology, 2003, 163~164: 164~168

    [11] Yu Zhinong, Seo Jong Wook, Zheng Dexiu et al.. Structural and discharging properties of MgO thin films prepared by ion beam-assisted deposition. Surface and Coatings Technology, 2003, 163~164: 398~404

    [12] Larruquert J I, Keski-Kuha R A M. Far ultraviolet optical properties of MgF2 films deposited by ion-beam sputtering and their application as protective coatings for Al. Opt. Commun., 2003, 215(1~3): 93~99

    [14] Qi Hongji, Jin Yonghao, Cheng Chuanfu et al.. Dynamic scaling behaviour in (2+1)-dimensional Kuramoto-Sivashinsky model. Chin. Phys. Lett., 2003, 20(5): 622~625

    [15] Sinha S K, Sirota E B, Garoff S. X-ray and neutron scattering from rough surfaces. Phys. Rev. (B), 1988, 38(4): 2297~2331

    [17] Edwards S F, Wilkinson D R. The Surface Statistics of a Granular Aggregate. London: Cambridge Univ. Press, Proceedings of the Royal Society, 1982, A381: 17

    [18] Drotar J T, Zhao Y P, Lu T M et al.. Numerical analysis of the noisy Kuramoto-Sivashinsky equation in 2+1 dimensions. Phys. Rev. (E), 1999, 59(1): 177~185

    CLP Journals

    [1] Liu Yunyan, Cheng Chuanfu, Song Hongsheng, Zang Yongli, Yang Shanying. Morphology Analysis of ZnO:Ga Thin Films Deposited by Pulsed Laser Deposition[J]. Acta Optica Sinica, 2011, 31(1): 131003

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering[J]. Acta Optica Sinica, 2004, 24(11): 1450
    Download Citation