[1] Teng WANG, Shuming YANG, Shusheng LI et al. Error analysis and compensation of galvanometer laser scanning measurement system. Acta Optica Sinica, 40, 2315001(2020).
[3] Jie MAO, Xi HOU, Fan WU. Position error analysis in radius interferometric measurements. Acta Photonica Sinica, 44, 0712003(2015).
[4] M MINSKY. Microscopy apparatus.
[7] Zhaoli ZHANG, Junhong SU. Simulation and reconstruction of 3D microscopic morphology of damaged optical film surface. Acta Photonica Sinica, 41, 0212002(2021).
[15] Rui YANG, Yu YUN, Bin XIE et al. Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler. High Power Laser & Particle Beams, 30, 170521(2018).
[17] Yong ZHOU, Banghui GUO, Can LI et al. Research on spectrum bandwidth of emergent light in lens center thickness measurement system. Laser & Optoelectronics Progress, 52, 081202(2015).
[18] Changcai CUI, Huang LI, Qing YU et al. Design of adjustable dispersive objective lens for chromatic confocal system. Optics and Precision Engineering, 25, 875-883(2017).
[19] Jinnan WANG, Fengdong CEHN, Bingguo LIU et al. White LED-based spectrum confocal displacement sensor. China Measurement & Testing Technology, 43, 69-73(2017).
[20] Jing MA, Yuejing QI, Zengxiong LU et al. Design of linear dispersive objective for chromatic confocal displacement sensor. Chinese Journal of Lasers, 46, 0704009(2019).
[21] Qian LIU, Weichuan YANG, Daocheng YUAN et al. Design of linear dispersive objective for chromatic confocal microscope. Optics and Precision Engineering, 21, 2473-2479(2013).
[25] Yang QIAO, Ning ZHANG, Xiping XU et al. Design of lens thickness measurement system based on confocal technology. Chinese Journal of Scientific Instrument, 32, 1635-1641(2011).