• Acta Photonica Sinica
  • Vol. 50, Issue 11, 1112001 (2021)
Jiayi WANG1, Tao LIU1、*, Xiaofeng TANG1, Jiaqi HU1, Xing WANG2, Guoqing LI1, Tao HE1, and Shuming YANG1
Author Affiliations
  • 1State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi’an 710049,China
  • 2Key Laboratory of Ultra⁃fast Photoelectric Diagnostics Technology,Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119,China
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    DOI: 10.3788/gzxb20215011.1112001 Cite this Article
    Jiayi WANG, Tao LIU, Xiaofeng TANG, Jiaqi HU, Xing WANG, Guoqing LI, Tao HE, Shuming YANG. Fiber-coupled Chromatic Confocal 3D Measurement System and Comparative Study of Spectral Data Processing Algorithms[J]. Acta Photonica Sinica, 2021, 50(11): 1112001 Copy Citation Text show less
    References

    [1] Teng WANG, Shuming YANG, Shusheng LI et al. Error analysis and compensation of galvanometer laser scanning measurement system. Acta Optica Sinica, 40, 2315001(2020).

    [2] Pengyu HU, Shuming YANG, Fenghe ZHENG et al. Accurate and dynamic 3D shape measurement with digital image correlation-assisted phase shifting. Measurement Science and Technology, 32, 075204(2021).

    [3] Jie MAO, Xi HOU, Fan WU. Position error analysis in radius interferometric measurements. Acta Photonica Sinica, 44, 0712003(2015).

    [4] M MINSKY. Microscopy apparatus.

    [7] Zhaoli ZHANG, Junhong SU. Simulation and reconstruction of 3D microscopic morphology of damaged optical film surface. Acta Photonica Sinica, 41, 0212002(2021).

    [8] R J GARZON, J MENESES, G TRIBILLON et al. Chromatic confocal microscopy by means of a continuum light generated through a standard single-mode fibre. Journal of Optics A: Pure and Applied Optics, 6, 544-548(2004).

    [9] Yichang CHEN, Shuping DONG, Chunchieh WANG et al. Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process, 7767, 77670P(2010).

    [10] C OLSOVSKY, R SHELTON, Z O CARRASCO et al. Chromatic confocal microscopy for multi-depth imaging of epithelial tissue. Biomedical Optics Express, 4, 732-740(2013).

    [11] G MOLESINI, P PEDRINI, F POGGI et al. Focus-wavelength encoded optical profilometer. Optics Communications, 49, 229-233(1984).

    [15] Rui YANG, Yu YUN, Bin XIE et al. Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler. High Power Laser & Particle Beams, 30, 170521(2018).

    [17] Yong ZHOU, Banghui GUO, Can LI et al. Research on spectrum bandwidth of emergent light in lens center thickness measurement system. Laser & Optoelectronics Progress, 52, 081202(2015).

    [18] Changcai CUI, Huang LI, Qing YU et al. Design of adjustable dispersive objective lens for chromatic confocal system. Optics and Precision Engineering, 25, 875-883(2017).

    [19] Jinnan WANG, Fengdong CEHN, Bingguo LIU et al. White LED-based spectrum confocal displacement sensor. China Measurement & Testing Technology, 43, 69-73(2017).

    [20] Jing MA, Yuejing QI, Zengxiong LU et al. Design of linear dispersive objective for chromatic confocal displacement sensor. Chinese Journal of Lasers, 46, 0704009(2019).

    [21] Qian LIU, Weichuan YANG, Daocheng YUAN et al. Design of linear dispersive objective for chromatic confocal microscope. Optics and Precision Engineering, 21, 2473-2479(2013).

    [22] Jiao BAI, Xinghui LI, Xiaohao WANG et al. Chromatic confocal displacement sensor with optimized dispersion probe and modified centroid peak extraction algorithm. Sensors, 19, 3592(2019).

    [23] Ding LUO, Cuifang KUANG, Xu LIU. Fiber-based chromatic confocal microscope with Gaussian fitting method. Optics and Laser Technology, 44, 788-793(2012).

    [24] A MIKS, J NOVAK, P NOVAK. Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor. Applied Optics, 49, 3259-3264(2010).

    [25] Yang QIAO, Ning ZHANG, Xiping XU et al. Design of lens thickness measurement system based on confocal technology. Chinese Journal of Scientific Instrument, 32, 1635-1641(2011).

    Jiayi WANG, Tao LIU, Xiaofeng TANG, Jiaqi HU, Xing WANG, Guoqing LI, Tao HE, Shuming YANG. Fiber-coupled Chromatic Confocal 3D Measurement System and Comparative Study of Spectral Data Processing Algorithms[J]. Acta Photonica Sinica, 2021, 50(11): 1112001
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