Luwen Lai, Zhigang Liu, Xiang Jiao, Jianqiang Zhu. Suppression of Mid-Spatial-Frequency Errors in Optical Elements by Polishing with Compound Swing Multi-Link Mechanism[J]. Chinese Journal of Lasers, 2019, 46(11): 1102001
- Chinese Journal of Lasers
- Vol. 46, Issue 11, 1102001 (2019)
Fig. 1. Principle of five-link-double-swing polishing mechanism
Fig. 2. Trajectories of polishing lap at different speed ratio
Fig. 3. Trajectories of polishing lap at different length of link
Fig. 4. Percentages of fitting error at different intervals of gratings
Fig. 5. Five-link-double-swing polishing system
Fig. 6. PSD curves of workpiece surface that polished by compound swing trajectory and translational motion with grating path in single direction
Fig. 7. PSD curves of workpiece surface that polished by compound swing trajectory and translational motion with orthogonal grating path
Fig. 8. Interference fringe patterns of polished workpiece surface. (a) Compound swing trajectory; (b) translational motion
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Table 1. Comparison of experimental processing parameters
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