• Chinese Journal of Lasers
  • Vol. 46, Issue 11, 1102001 (2019)
Luwen Lai1、2、*, Zhigang Liu1、2、**, Xiang Jiao1, and Jianqiang Zhu1、2
Author Affiliations
  • 1Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences,Beijing 100049, China
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    DOI: 10.3788/CJL201946.1102001 Cite this Article Set citation alerts
    Luwen Lai, Zhigang Liu, Xiang Jiao, Jianqiang Zhu. Suppression of Mid-Spatial-Frequency Errors in Optical Elements by Polishing with Compound Swing Multi-Link Mechanism[J]. Chinese Journal of Lasers, 2019, 46(11): 1102001 Copy Citation Text show less

    Abstract

    In high-power laser systems, traditional small-tool polishing results in significant mid-spatial-frequency errors, which reduce the stability and reliability of such systems. In this study, we propose a polishing method that uses the compound swing trajectory (CST) based on a simple harmonic motion and demonstrate a polishing system that employs the CST of a multi-link mechanism. By analyzing the basic principle of small-tool polishing, we observe that the regular and orderly trajectories of traditional translational motion (TM) polishing are important causes of the mid-spatial-frequency errors. Further, we propose a function model based on a CST, study the basic polishing process, and perform the discretization calculation for such trajectories to improve the complexity of the trajectory of the removal function. We conduct a processing experiment by selecting appropriate process parameters and trajectories for the removal functions to compare the CST with the traditional TM. Subsequently, we measure the wavefronts using interferometers and observe that the interferometric fringe patterns obtained using the CST processing method are without burrs and smoother than those obtained using TM processing method. The power-spectral-density curve obtained using the CST processing method is lower than that obtained using the TM processing method in 50 mm×50 mm, displaying a better overall processing effect. These experimental results denote that a polishing system using the CST of a multi-link mechanism exhibits a significantly greater capability in suppressing mid-spatial-frequency errors when compared with the TM method.
    Luwen Lai, Zhigang Liu, Xiang Jiao, Jianqiang Zhu. Suppression of Mid-Spatial-Frequency Errors in Optical Elements by Polishing with Compound Swing Multi-Link Mechanism[J]. Chinese Journal of Lasers, 2019, 46(11): 1102001
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