A two-dimensional high-frequency electrostatic microscanner

Yaobo Liu; Weizheng Yuan; Dayong Qiao; Meng Wu; Xuan Yang; Bin Lian

doi:10.3788/col201311.112302

Journals >Chinese Optics Letters >Volume 11 >Issue 11 >Page 112302 > Article

Chinese Optics Letters
Vol. 11, Issue 11, 112302 (2013)

A two-dimensional high-frequency electrostatic microscanner

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, and Bin Lian

DOI: 10.3788/col201311.112302 Cite this Article Set citation alerts

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, Bin Lian. A two-dimensional high-frequency electrostatic microscanner[J]. Chinese Optics Letters, 2013, 11(11): 112302 Copy Citation Text

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Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, Bin Lian. A two-dimensional high-frequency electrostatic microscanner[J]. Chinese Optics Letters, 2013, 11(11): 112302

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