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    Journals >Laser & Optoelectronics Progress >Volume 51 >Issue 2 >Page 21201 > Article
    • Laser & Optoelectronics Progress
    • Vol. 51, Issue 2, 21201 (2014)
    Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure
    Peng Bofang1、2、*, Lu Hailiang2, Wang Fan2, Xu Qixin1、2, and Hou Wenmei1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop51.021201 Cite this Article Set citation alerts
    Peng Bofang, Lu Hailiang, Wang Fan, Xu Qixin, Hou Wenmei. Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure[J]. Laser & Optoelectronics Progress, 2014, 51(2): 21201 Copy Citation Text show less
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    Article index updated: May. 16, 2024
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    Peng Bofang, Lu Hailiang, Wang Fan, Xu Qixin, Hou Wenmei. Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure[J]. Laser & Optoelectronics Progress, 2014, 51(2): 21201
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