Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position

Liwei Zhou

doi:10.3788/AOS202242.0811004

Journals >Acta Optica Sinica >Volume 42 >Issue 8 >Page 0811004 > Article

Acta Optica Sinica
Vol. 42, Issue 8, 0811004 (2022)

Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position

Liwei Zhou^*

Author Affiliations

School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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DOI: 10.3788/AOS202242.0811004 Cite this Article Set citation alerts

Liwei Zhou. Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position[J]. Acta Optica Sinica, 2022, 42(8): 0811004 Copy Citation Text

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Crossover formed by electron beam in electrostatic focusing concentric spherical system. (a) Formation of crossover; (b) enlarged view of crossover tail

Fig. 1. Crossover formed by electron beam in electrostatic focusing concentric spherical system. (a) Formation of crossover; (b) enlarged view of crossover tail

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Fig. 2. Determination of optimal image plane position and its minimum diffusion circle

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Fig. 3. Focal diffusing surface and conical surface at imaging section formed by electron beam emitted from axial object point

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cos δ₀	0	0.1	0.2	0.3	0.4	0.5	0.6	0.7	0.8	0.9	1.0
Δρ_1v	1.00000	0.86117	0.72792	0.60090	0.48096	0.36901	0.26630	0.17444	0.09576	0.03414	0
Δρ_2v	0	0.20000	0.40000	0.60000	0.80000	1.00000	1.20000	1.40000	1.60000	1.80000	2.00000

Table 1. Lateral aberration formed by electron beam emitted from axial object point from limiting image plane to Gauss image plane (image spot)

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