A beam-steering antenna array based on surface micro-machined process was proposed for 60GHz high data rate wireless communication. The air-filled coaxial structure based surface micro-machined process provides low loss rectangular micro-coaxial transmission line and feeding network. The insertion loss of designed transmission line is less than 0.18dB for both measured and simulated results. Simulated and measured results agree well. The size of beam-steering antenna array is 17.5×14.5×0.42 mm3 and bandwidth is around 10 GHz (55~65 GHz) under the condition of voltage standing wave ratio (VSWR) less than 2, which covers full frequency band standard. The steering beam directions are ±35° with 11.8dBi and ±11° with 12.1 dBi at 60 GHz, respectively.