• Acta Optica Sinica
  • Vol. 17, Issue 12, 1756 (1997)
[in Chinese] and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese]. Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode[J]. Acta Optica Sinica, 1997, 17(12): 1756 Copy Citation Text show less
    References

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    [4] Kenji Kurihara, Hiroo Kinoshita, Tsutanic Mizota et al.. Two-mirror telecentric optics for soft X-ray reduction lithography. J. Vac. Sci. Technol. (B), 1991, 9(6): 3189~3192

    [5] I. M. Egdall. Manufacture of a three-mirror wide-field optical system. Opt. Engng., 1985, 24(2): 285~289

    [6] W. B. Wetherell, Daniel H. Schuite, David A. Womble. New optical configurations for wide-field telescopes. Proc. Opt. and IR. Telescopes for the 1990s. Ⅱ (Kitt Peak Nationa Observatory), 1980: 878~895

    [7] I. R. Abel, M. R. Hatch. The pursuit of symmetry in wide-angle reflective optical degsin. Proc. SPIE, 1980, 237: 271~280

    [in Chinese], [in Chinese]. Two-Mirror Aspheric Optical System for Soft X-Ray Lithography with Nonscanning Mode[J]. Acta Optica Sinica, 1997, 17(12): 1756
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