Quanan Chen, Chun Jiang, Kuankuan Wang, Miao Zhang, Xiang Ma, Ye Liu, Qiaoyin Lu, Weihua Guo. Narrow-linewidth thermally tuned multi-channel interference widely tunable semiconductor laser with thermal tuning power below 50 mW[J]. Photonics Research, 2020, 8(5): 671
- Photonics Research
- Vol. 8, Issue 5, 671 (2020)
Fig. 1. Microscope image of the fabricated thermally tuned MCI laser.
Fig. 2. Schematic drawing of the wafer structure.
Fig. 3. Fabrication processes of the suspended thermal tuning waveguide.
Fig. 4. SEM images of the suspended thermal tuning waveguides after wet etching: (a) top view; (b) cross section; (c) side view.
Fig. 5. Two-dimensional temperature distribution of the cross section at the middle of the thermal tuning waveguides: (a) with air gap; (b) without air gap.
Fig. 6. Temperature distribution along the center of the InGaAsP waveguide layer with heating power increasing from 2 to 20 mW at a step of 2 mW: (a) with air gap; (b) without air gap.
Fig. 7. Calculated phase changes of the thermal tuning waveguides with and without air gap at different heating powers.
Fig. 8. Experimental setups for characterization of the thermally tuned MCI laser, including wavelength characterization, spectral measurement, and linewidth measurement.
Fig. 9. Output power and lasing wavelength versus micro-heater power of a heated arm phase section.
Fig. 10. (a) Measured ASE spectrum below threshold current. Injection current of the gain section was 14 mA. (b) Fourier transform analysis of the ASE spectrum below threshold current. (c) Phase changes of the eight arms. The red line is the phase change of the heated arm, and the dashed line is 2 π
Fig. 11. Typical lasing spectrum at wavelength 1545 nm. Resolution of the optical spectrum analyzer is 0.02 nm.
Fig. 12. (a) Superimposed lasing spectra from 1535 to 1580.2 nm with a wavelength spacing of 0.4 nm; (b) corresponding SMSRs and peak powers.
Fig. 13. Relationship between lasing wavelength and chip temperature.
Fig. 14. (a) Total micro-heater powers needed for the 114 wavelengths; (b) measured Lorentzian linewidth of the 114 wavelengths.
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