• Opto-Electronic Engineering
  • Vol. 38, Issue 7, 81 (2011)
XIE Yuan-an1、* and HAN Zhi-gang2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2011.07.015 Cite this Article
    XIE Yuan-an, HAN Zhi-gang. Study of Spatial Frequency Domain Analysis Method Based on White Light Interferometry[J]. Opto-Electronic Engineering, 2011, 38(7): 81 Copy Citation Text show less
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    [3] Harasaki A,Schmit J,Wyant J C. Improved vertical scanning interferometry [J]. Applied Optics(S1559-128X),2000,39(13): 2107-2115.

    [4] de Groot P,Deck L. Surface profiling by analysis of white light interferogrames in the spatial frequency domain [J]. Journal of Modern Optics(S0950-0340),1995,42(2):389-401.

    [5] de Groot P,de Lega X C,Kramer J,et al. Determination of fringe order in white light interference microscopy [J]. Applied Optics(S1559-128X),2002,41(22):4571-4578.

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    [7] LI Chao-hui. Research of micro-surface profilometry based on phase-stepping interferometer [D]. Tianjin:Tianjin University, 2004.

    [8] CHANG Su-ping. The surface shape and profile dimension measurement method and system based on white-light interferometric technology [D]. Wuhan:Huazhong University of Science and Technology,2007.

    [9] HUI Mei. Research on algorithms and experiments of phase shifting interferometry in measuring micro topography [D]. Xi’an: Xi'an Institute of Optics and Precision Mechanic, Chinese Academy of Sciences,2001.

    [10] YANG Tian-bo,GUO Hong,LI Da-cheng. The summary of algorithms for whitelight scanning interferometry [J]. Optical Technique,2006,32(11):115-120.

    [11] LIU Chen,CHEN Lei,WANG Jun,et al. Measurement of Surface Topography by Using White-light Scanning Interferometry [J]. Opto-Electronic Engineering,2011,38(1):71-75.

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    XIE Yuan-an, HAN Zhi-gang. Study of Spatial Frequency Domain Analysis Method Based on White Light Interferometry[J]. Opto-Electronic Engineering, 2011, 38(7): 81
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