[1] Vdovin G, Sarro P M, Middelhoek S. Technology and applications of micromachined membrane deformable mirrors[C]. LEOS Summer Topical Meeting, 1998. 97~98
[3] Bifano Thomas G, Krishnamoorthy Raji. Surface micromachined deformable mirrors[J]. IEEE ETFA, 1996, 2: 393~399
[5] Rainer Riesenberg, Johann M. Koehler, Horst Porwol. New micro-optical devices based on micromechanics[C]. Proc. SPIE, 1994, 2213: 70~76
[7] Stoney G G. The tension of metallic films deposited by electrolysis[C]. Proc. Roy. Soc. London, 1909, 9: 172~175