An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

doi:10.3788/aos201535.0705001

Journals >Acta Optica Sinica >Volume 35 >Issue 7 >Page 705001 > Article

Acta Optica Sinica
Vol. 35, Issue 7, 705001 (2015)

An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System

[in Chinese]^1、2、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]^1、2

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¹[in Chinese]

²[in Chinese]

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DOI: 10.3788/aos201535.0705001 Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2015, 35(7): 705001 Copy Citation Text

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