• Chinese Optics Letters
  • Vol. 10, Issue s2, S21304 (2012)
Jie Teng, Junbo Feng, Jin Guo, and Mingshan Zhao
DOI: 10.3788/col201210.s21304 Cite this Article Set citation alerts
Jie Teng, Junbo Feng, Jin Guo, Mingshan Zhao, "Fabrication of high-Q polymer microring resonators," Chin. Opt. Lett. 10, S21304 (2012) Copy Citation Text show less

Abstract

A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining waveguides. The PSQ-L polymer film shows good optical properties and high thermal stability. The all polymer microring resonator is fabricated by conventional lithography and ICP etching process. About 3-dB extinction ratio from the through port and 23-dB extinction ratio from the drop port are obtained. A high Q value of 5.7×104 is obtained. The optical loss of the bending waveguides is estimated to be 1.6 dB/cm. The high Q polymer ring resonators show potential in sensing applications.