Limb radiation detection is a new type of satellite detection technology, which mainly uses ultraviolet-visible-infrared solar scattering spectrum to obtain the vertical resolution profile information of trace gases such as ozone. In this paper, based on wavelength pairing spectral analysis method, multiplicative algebraic reconstruction technology, and SCIATRAN forward model, the ozone number density with vertical height of 10-40 km and resolution of 1 km is retrieved by using the limb radiation of SCIAMACHY instrument. First, according to the absorption characteristics of ozone in Chappuis-Wulf band, the mechanism of wavelength pairing is analyzed, and the wavelength and inversion range of ozone inversion are determined by combining the limb radiation weighting function. Then, the influence of several typical wavelength pairing combinations on the inversion results are analyzed, and a group of better wavelength pairing combination is determined. Finally, the error sources in the inversion process of iterative algorithm, such as iteration times, prior profile, tangent height and NO₂ concentration are inversed in different degrees. The error results show that these parameters will affect the inversion results of ozone profile with vertical height less than 20 km.