Eroding of lead zirconate titanate (PZT) thin films

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 36 >Issue 5 >Page 711 > Article

Infrared and Laser Engineering
Vol. 36, Issue 5, 711 (2007)

Eroding of lead zirconate titanate (PZT) thin films

[in Chinese]^*, [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Eroding of lead zirconate titanate (PZT) thin films[J]. Infrared and Laser Engineering, 2007, 36(5): 711 Copy Citation Text

show less

References

[6] EZHILVALAVAN S,SAMPER V D.Ferroelectrics properties of wet-chemical patterned PbZr0.52Ti0.45O3 films[J].Applied Physics Letters,2005,86(7):301-306.

[7] LIU W,KO J,ZHU W.Device patterning of PZT/Pt/Ti/thin films on SiO2/Si3N4 membrane by a chemical wet etching approach[J].Journal of Materials Science Letters,2000,19(24):2263-2265.

CLP Journals

[1] Zhe Luo, Shumei Wang, Xunliang Yan, Xinsan Li. Trajectory optimization design of ascending stage of RBCC powered hypersonic vehicle[J]. Infrared and Laser Engineering, 2022, 51(8): 20210956

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Eroding of lead zirconate titanate (PZT) thin films[J]. Infrared and Laser Engineering, 2007, 36(5): 711

Download Citation

Tools

Save the article for my favorites

Paper Information