Qin Yang, Lei Chen, Dongmei Guo, Jie Wang, Wei Xia, Hui Hao, Ming Wang. Laser Feedback Interferometer for Two-Dimensional Dynamic Displacement Measurement Based on Frequency Division Multiplexing Technique[J]. Acta Optica Sinica, 2022, 42(10): 1012003
- Acta Optica Sinica
- Vol. 42, Issue 10, 1012003 (2022)
Fig. 1. Schematic diagram of laser feedback interferometer for two-dimensional dynamic displacement measurement based on frequency division multiplexing technique
Fig. 2. Schematic diagram of two-dimensional displacementof grating
Fig. 3. Experimental setup
Fig. 4. Experimental results of two-dimensional nano-displacement platform moving in X and Z directions. (a) Laser feedback interference signal; (b) Fourier spectrum of interference signal; (c) reconstruction result of two-dimensional dynamic displacement
Fig. 5. Displacement reconstruction results. (a1)(b1) Relationship between grating displacement in X direction and motion time; (a2)(b2) relationship between grating displacement in Z direction and motion time; (a3)(b3) Lissajous images restructed by displacements in X and Z directions
Fig. 6. Schematic diagram of angular deviation between grating plane and moving axis of nano-displacement platform
Fig. 7. Schematic diagram of system measurement range
Fig. 8. System stability test
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20