• Chinese Optics Letters
  • Vol. 8, Issue s1, 53 (2010)
Jarmo Maula
Author Affiliations
  • Beneq Oy, Vantaa, Finland
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    DOI: 10.3788/COL201008s1.0053 Cite this Article Set citation alerts
    Jarmo Maula. Atomic layer deposition for industrial optical coatings[J]. Chinese Optics Letters, 2010, 8(s1): 53 Copy Citation Text show less
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    Data from CrossRef

    [1] Yang Zhao, Lei Zhang, Jian Liu, Keegan Adair, Feipeng Zhao, Yipeng Sun, Tianpin Wu, Xuanxuan Bi, Khalil Amine, Jun Lu, Xueliang Sun. Atomic/molecular layer deposition for energy storage and conversion. Chemical Society Reviews, 50, 3889(2021).

    [2] Lauri Aarik, Hugo M?ndar, Aivar Tarre, Helle-Mai Piirsoo, Jaan Aarik. Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition. Surface and Coatings Technology, 438, 128409(2022).

    [3] Kristin Pfeiffer, Lilit Ghazaryan, Ulrike Schulz, Adriana Szeghalmi. Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition. ACS Applied Materials & Interfaces, 11, 21887(2019).

    [4] Andrew Short, Leila Jewell, Sage Doshay, Carena Church, Trevor Keiber, Frank Bridges, Sue Carter, Glenn Alers. Atomic layer deposition of zinc sulfide with Zn(TMHD)2. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 31, 01A138(2013).

    [5] Peter Jamieson, Donald Blank, Janelle Ghanem, Tyler McGrew, Giancarlo Corti, Miriam Leeser. A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System. International Journal of Reconfigurable Computing, 2022, 1(2022).

    [6] Kristin Pfeiffer, Ulrike Schulz, Andreas Tünnermann, Adriana Szeghalmi. Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition. Coatings, 7, 118(2017).

    [7] J. López, E. Solorio, H.A. Borbón-Nu?ez, F.F. Castillón, R. Machorro, N. Nedev, M.H. Farías, H. Tiznado. Refractive index and bandgap variation in Al2O3-ZnO ultrathin multilayers prepared by atomic layer deposition. Journal of Alloys and Compounds, 691, 308(2017).

    [8] Theodor Weiss, Wolfgang Ebert. Atomic Layer Deposition for Coating of Complex 3D Optics. Optik & Photonik, 12, 42(2017).

    [9] Alexander G. Hufnagel, Sebastian H?ringer, Michael Beetz, Bernhard B?ller, Dina Fattakhova-Rohlfing, Thomas Bein. Carbon-templated conductive oxide supports for oxygen evolution catalysis. Nanoscale, 11, 14285(2019).

    [10] J. Lopez, H. Márquez, H. Borbón - Nu?ez, N. Abundiz, R. Machorro, M.H. Farías, O.E. Contreras, H. Tiznado, G. Soto. Non-quarter-wave dielectric mirror prepared by thermal atomic layer deposition. Optics & Laser Technology, 127, 106143(2020).

    [11] Shuai Guo, Lei Yang, Bing Dai, Fangjuan Geng, Victor Ralchenko, Jiecai Han, Jiaqi Zhu. Past Achievements and Future Challenges in the Development of Infrared Antireflective and Protective Coatings. physica status solidi (a), 217, 2000149(2020).