Yidong Tan, Xin Xu, Shulian Zhang. Precision Measurement and Applications of Laser Interferometry[J]. Chinese Journal of Lasers, 2021, 48(15): 1504001
- Chinese Journal of Lasers
- Vol. 48, Issue 15, 1504001 (2021)
![Principle of dual-frequency laser generation[10]. (a) Acousto-optic frequency-shift; (b) dual longitudinal modes to select the frequency](/richHtml/zgjg/2021/48/15/1504001/img_1.jpg)
Fig. 1. Principle of dual-frequency laser generation[10]. (a) Acousto-optic frequency-shift; (b) dual longitudinal modes to select the frequency
![Zeeman-birefringence dual-frequency laser[10]](/richHtml/zgjg/2021/48/15/1504001/img_2.jpg)
Fig. 2. Zeeman-birefringence dual-frequency laser[10]
Fig. 3. Frequency stabilization via equal intensity method
Fig. 4. Frequency difference drift in a long period
Fig. 5. The schematic of dual-frequency interference
Fig. 6. Drift test results for designed dual-frequency laser interferometers
Fig. 7. 70 m linearity test in National Institute of Metrology, China
Fig. 8. 70 m linearity test results of Zeeman-birefringence dual-frequency laser interferometer. (a) Linearity; (b) measurement errors
Fig. 9. Measuring device of nonlinear errors
Fig. 10. Comparison of nonlinear errors of two dual-frequency laser interferometer[32]. (a) Agilent dual-frequency laser interferometer; (b) Zeeman-birefringence dual-frequency laser interferometer
Fig. 11. Precise measurement applications with Zeeman-birefringence dual-frequency laser interferometer. (a) Test of satellite electric propulsion system; (b) CNC machine calibration; (c) coordinate measuring machine calibration
Fig. 12. Zeeman-birefringence dual-frequency laser used in Nikon NSR mask aligner
Fig. 13. Zeeman-birefringence dual-frequency laser interferometer
Fig. 14. The schematic of three-mirror model for laser feedback interferometry[46]
Fig. 15. Schematic of laser feedback effect. (a) Zero frequency feedback; (b) frequency-shifted feedback
Fig. 16. Laser frequency-shifted feedback optical system
Fig. 17. Output characteristics of solid-state microchip laser. (a) Fundamental transverse and longitudinal mode; (b) wavelength and power stability
Fig. 18. Laser power spectra under different feedback levels. (a)--(c) Simulation results; (d)--(f) experimental results
Fig. 19. Gain function curve
Fig. 20. Laser frequency-shifted feedback optical system
Fig. 21. Flow chart of the phase demodulation of laser frequency-shifted feedback interferometer
Fig. 22. Test results of the laser frequency-shifted feedback interferometer. (a) Short-period drift; (b)displacement resolution
Fig. 23. Laser frequency-shifted feedback interferometer
Fig. 24. Single-spot two-dimensional displacement measurement based on laser frequency-shifted feedback interferometry[52]
Fig. 25. Two-dimensional displacement resolution. (a) In-plane displacement; (b) off-plane displacement
Fig. 26. Two-dimensional displacement test results. (a) Random motion; (b) circle motion
Fig. 27. Rotation measurement method based on double-beam frequency-shifted feedback interferometry
Fig. 28. Frequency-shifted signals[76]. (a) S1; (b) S2
Fig. 29. Remote eavesdropping system based on laser frequency-shifted feedback[77]
Fig. 30. The spectrograms of the test sound recovered in the different distances[77]. (a) Test sound spectrogram; recovered spectrograms at (b) 100 m, (c) 150 m, and (d) 200 m
Fig. 31. Schematic of liquid refractive index measurement[62]
Fig. 32. Measurement system for materials’ coefficient of thermal expansion. (a) System diagram; (b) device
Fig. 33. Laser confocal frequency-shifted feedback imaging system
Fig. 34. Two-dimensional longitudinal view of microfluidic channels. (a) LFCT system imaging result at 0.02 mW; (b) LCT system imaging result at 0.02 mW; (c) LCT system imaging result at 0.73 mW; (d) microfluidic chip structure diagram
Fig. 35. Laser ultrasound frequency-shifted feedback imaging system[89]
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Table 1. Technical performance of Zeeman-birefringence dual-frequency interferometer[34]
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