• Infrared and Laser Engineering
  • Vol. 44, Issue 4, 1236 (2015)
Han Zhigang1、* and Chen Lei1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    Han Zhigang, Chen Lei. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error[J]. Infrared and Laser Engineering, 2015, 44(4): 1236 Copy Citation Text show less
    References

    [1] Malacara D. Optical Shop Testing[M]. 3rd ed. New Jersey:John Wiley & Sons, Inc, 2007.

    [2] Zhu Rihong, Chen Lei, Wang Qing, et. al. Phase shifting interferometry and its application[J]. Journal of Applied Optics, 2008, 27(2): 85-88. (in Chinese)

    [3] Leach R. Optical Measurement of Surface Topography[M]. Berlin: Springer-Berlin Heidelberg, 2011.

    [4] Sandoz P. An algorithm for profilometry by white-light phase shifting interferometry[J]. Journal of Modern Optics, 1996, 43(8): 1545-1554.

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    [7] Groot P, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain [J]. Journal of Modern Optics, 1995, 42: 389-401.

    [8] Ma S, Quan C, Zhu R, et al. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry[J]. Optics Communications, 2011, 284(10-11): 2488-2493.

    [9] Li M, Quan C, Tay C. Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry[J]. Optics Lasers Technology, 2008, 40: 920-929.

    [10] Adachi M. Phase-shift algorithm for white-light interferometry insensitive to linear errors in phase shift [J]. Optics Review, 2008, 15(3): 148-155.

    [11] Roy M, Cox G, Hariharan P. Low-coherence interference microscope with an improved switchable achromatic phase-shifter [J]. Optics Express, 2005, 13(22): 9125-9130.

    [12] Yang Y, Ding Z, Wang K, et al. Full-field optical coherence tomography by achromatic phase shifting with a rotating half-wave plate[J]. Journal of Optics, 2010, 12(3): 035301.

    [13] Schmit J, Olszak A. High-precision shape measurement by white-light interferometry with real-time scanner error correction [J]. Applied Optics, 2002, 42(28): 5934-5950.

    [14] Wang Jun, Chen Lei. Measurement of micro-displacement using white interference based on a spatial frequency domain algorithm[J]. Infraded and Laser Engineering, 2008, 37(5): 874-877. (in Chinese)

    CLP Journals

    [1] Chao Zhang, Qun Yuan, Jiale Zhang, Yi Ji, Zhishan Gao, Junhua Yan. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 2022, 51(7): 20220050

    Han Zhigang, Chen Lei. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error[J]. Infrared and Laser Engineering, 2015, 44(4): 1236
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